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2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[19p-B101-4]Achievement of 3.9 times efficiency increase of 232nm UVC-LED with reflective PhC

〇Yukio Kashima¹, Eriko Matsuura¹, Hidetoshi Shinohara², Ryuichirou Kamimura³, Yamato Osada³, Masayuki Fukuda³, Tsumugu Nagano⁴, Hiroyuki Oogami⁵, Yasushi Iwaisako⁵, Minoru Kawahara⁶, Masato Yamada⁶, Hideki Hirayama¹ (1.RIKEN, 2.Shibaura machine, 3.ULVAC, 4.DNP, 5.NIPPON TUNGSTEN, 6.Shin-Etsu Chemical)

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Keywords:

232nm UVC-LED,Photonic crystal (PhC),Light extraction efficiency (LEE)

We fabricated PhC (diameter:139nm/period:199nm/depth:95nm) hole in triangle arrangement at p-GaN contact layer. In p-AlGaN thickness was 65nm, 2.17mW of power and 0.4% of EQE was achieved. This results is 3.9 times efficiency increasd comparing with Non-PhC.

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