Presentation Information
[19p-B101-9]Analysis of alteration layer formed by treating AlxGa1-xN with saturated vapor pressure water
〇Eri Matsubara1, Ryosuke Kondo1, Toma Nishibayashi1, Ryoya Yamada1, Yoshinori Imoto1, Koki Hattori1, Sho Iwayama1, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Shintaro Kobayashi3, Taiji Yamamoto3, Hideto Miyake2 (1.Meijo Univ., 2.Mie Univ., 3.Rigaku Corp.)
Keywords:
AlGaN,XRD,UV-B