Presentation Information
[19p-B201-3]Identification of hydrogen-related shallow donors in silicon: Part 1
〇Takahide Umeda1, Akira Kiyoi2 (1.Univ. of Tsukuba, 2.Mitsubishi Elec.)
Keywords:
Si,hydrogen,shallow donor
Hydrogen in Si has been widely studied so far; however, a mysterious issue still remains. Hydrogen can create a shallow donor state in Si, whih is called "hydrogen-related donors (HDs)" and was found in 1970's. How to create the shallow donor state via hydrogen remains unknown. We are trying to reveal the atomic origin of the HDs by using electron spin resonance (ESR) spectroscopy. We found new ESR signals of the HDs, named "MT1", "MT2", and "MT3". Finally, we concluded that these "MTx" (x=1,2,3) centers originate from an interstitial cluster (I4) coupled with hydrogen atom(s).