The 84th JSAP Autumn Meeting 2023
Advanced Search

Session Details

Oral presentation15 Crystal Engineering : 15.7 Crystal characterization, impurities and crystal defects

[19p-B201-1~7]15.7 Crystal characterization, impurities and crystal defects

Tue. Sep 19, 2023 1:30 PM - 3:15 PM JST
Tue. Sep 19, 2023 4:30 AM - 6:15 AM UTC
B201 (Civic Auditorium)
Kazuhisa Torigoe(SUMCO), Eiji Kamiyama(GlobalWafers Japan)
PDF DownloadDownload PDF
1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[19p-B201-1]Reduction of SiO2/Si Interface State Density using Hydrogen Passivation Effects of
Silicon-Hydride and Hydrocarbon Hybrid Ion-Implanted Epitaxial Wafers

〇Ryosuke Okuyama1, Takeshi Kadono1, Ayumi Masada1, Akihiro Suzuki1, Koji Kobayashi1, Satoshi Shigematsu1, Ryo Hirose1, Yoshihiro Koga1, Kazunari Kurita1 (1.SUMCO)
PDF DownloadDownload PDF
1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[19p-B201-2]Recrystallization Initial Process of Discrete Amorphous Regions in Hydrocarbon Molecular Ion Implanted Silicon Wafer Surface

〇kouji kobayashi1,2, Ryosuke Okuyama1, Takeshi Kadono1, Ayumi Masada1, Ryo Hirose1, Akihiro Suzuki1, Yoshihiro Koga1, Kazunari Kurita1, Koji Sueoka3 (1.SUMCO, 2.Grad. Sch. of Comput. Sci. and Sys. Eng., Okayama Pref. Univ., 3.Dept. of Inf. and Commun. Eng., Okayama Pref. Univ.)
PDF DownloadDownload PDF
2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[19p-B201-3]Identification of hydrogen-related shallow donors in silicon: Part 1

〇Takahide Umeda1, Akira Kiyoi2 (1.Univ. of Tsukuba, 2.Mitsubishi Elec.)
PDF DownloadDownload PDF
2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)

[19p-B201-4]Identification of hydrogen-related shallow donors in silicon: Part 2

〇Takahide Umeda1, Akira Kiyoi2 (1.Univ. of Tsukuba, 2.Mitsubishi Elec.)
PDF DownloadDownload PDF
2:30 PM - 2:45 PM JST(5:30 AM - 5:45 AM UTC)

[19p-B201-5]Quality of silicon substrate and point defects: 2nd generation
(10) Segregation, micro and macro (average)

〇Naohisa Inoue1, Shuichi Kawamata1, Shuichi Okuda1 (1.Radiation Research Center, Osaka Metropolitan Univ.)
PDF DownloadDownload PDF
2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[19p-B201-6]High sensitivity infrared absorption spectroscopy and infrared defect dynamics of silicon crystal, 2-nd generation (22) Dipole moment of N-complexes

〇Naohisa Inoue1, Shuichi Kawamata1, Shuichi Okuda1 (1.Radiaiton Research Center, Osaka Metropolitan Univ.)
PDF DownloadDownload PDF
3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[19p-B201-7]Measurement of carbon concentration in silicon crystal, 2-nd generation
(26) Measurement of 1012/cm3 difference in 1013/cm3 synthetic samples by IR

〇Naohisa Inoue1, Shuichi Okuda1, Shuichi Kawamata1 (1.Radiation research Center, Osaka Metropolitan Univ.)
PDF DownloadDownload PDF
Back to Category List