Presentation Information
[19p-B201-4]Identification of hydrogen-related shallow donors in silicon: Part 2
〇Takahide Umeda1, Akira Kiyoi2 (1.Univ. of Tsukuba, 2.Mitsubishi Elec.)
Keywords:
Si,hydrogen,shallow donor
We have indentified the atomic origin of the shallow HDs (hydrogen-related donors) as an interstitial cluster (I4) + hydrogen atom(s), based on electron-spin-resonance (ESR) spectroscopic analyses. We here discuss the nature of the HDs. Their thermal stabilities show that two kinds of the HDs (named "HD1" and "HD2" in previous works) coresspond to our ESR signals of "MT1" and "MT2/MT3", respectively. We performed a cyclotron resonance (CR) study on conduction-band electrons (CEs) for understanding a relationship between the HDs and CEs. Consequently we found that the HD2 (=MT2 and MT3) has a "double donor" nature. Every two HD2s forms a close-coupled pair, resulting in an exchange-narrowing ESR signal of "MT3".