[19p-P01-1~75] 17 Nanocarbon and Two-Dimensional Materials (Poster)

[19p-P01-68] Etching of silicon assisted by MoS₂ nanosheets in HF vapor

〇Kaichi Yamamoto¹, Toru Utsunomiya¹, Takashi Ichii¹, Hiroyuki Sugimura¹ (1.Kyoto Univ.)

Keywords:

silicon,molybdenum disulfide,assisted chemical etching