[20a-A302-1~10] 21.1 Joint Session K "Wide bandgap oxide semiconductor materials and devices"

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)

[20a-A302-9] Local Structural Analysis of Transparent Conducting Anatase TiO₂ Films

〇Tomohito Sudare¹, Reiichi Ueda¹, Ryota Shimizu^1,2, Ryo Nakayama¹, Naoomi Yamada³, Taro Hitosugi^1,2 (1.Univ. Tokyo, 2.Tokyo Tech., 3.Chubu Univ.)

Keywords:

TiO2,X-ray absorption fine structure (XAFS),Interstitial oxygen