Presentation Information
[20a-A304-6]Threshold Voltage Control by Al Diffusion for NMOSFET with Metal Gate Stack
〇Yuya Omura1, Shoji Aota1, Tomoya Wada1, Tomoyuki Funabasama1, Kasumi Yasuda1, Daisuke Watanabe1, Hiroki Okamoto1, Isamu Ito1, Masato Koyama1 (1.KIOXIA)
Keywords:
metal gate