[20a-A304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

11:00 AM - 11:15 AM JST(2:00 AM - 2:15 AM UTC)English Presentation

[20a-A304-8] Performance Enhancement of Extremely-thin Body (111) Ge-on-Insulator nMOSFETs by Using Flipped Substrate Process

〇Xueyang Han¹, Chia-Tsong Chen¹, Kei Sumita¹, Kasidit Toprasertpong¹, Mitsuru Takenaka¹, Shinichi Takagi¹ (1.Univ. Tokyo)

Keywords:

(111) Ge,GOI,extremely-thin body