講演情報

[20a-A304-8]Performance Enhancement of Extremely-thin Body (111) Ge-on-Insulator nMOSFETs by Using Flipped Substrate Process

〇Xueyang Han1, Chia-Tsong Chen1, Kei Sumita1, Kasidit Toprasertpong1, Mitsuru Takenaka1, Shinichi Takagi1 (1.Univ. Tokyo)

キーワード:

(111) Ge、GOI、extremely-thin body