[20p-A202-1~11] Interfacial Nano Electrochemistry: Deepening semiconductor wet processing

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-A202-9] Observation of absorption and desorption due to volume change of PVA brushes

〇Shota Suzuki¹, Yuki Mizushima¹, Satomi Hamada², Ryota Koshino², Toshiyuki Sanada¹ (1.Shizuoka Univ., 2.Ebara Corp.)

Keywords:

post-CMP cleaning,PVA brush

This study focused on liquid transport when the PVA brush contacts the surface and deforms to improve the efficiency of the PVA brush for post-CMP cleaning. We simulated the major deformations of the PVA brush during actual cleaning and visualized the fluid flow due to PVA brush deformation using fluorescence. We evaluated the relation between liquid desorption and volume change of brush, flow direction, and range of liquid movement.