[20p-A303-1~9] Accelerating Semiconductor Manufacturing by Cyber-Physical Systems with AI and Optimization Computing

5:20 PM - 6:00 PM JST(8:20 AM - 9:00 AM UTC)

[20p-A303-7] Green Transformation of Semiconductor Processes

〇Masaru Hori¹ (1.Nagoya Univ.)

Keywords:

plasma

In the development of semiconductor plasma processes, thousands of trials are conducted to find the optimum 1 condition, and the waste of energy, resources, and labor invested is enormous. For this reason, the introduction of AI has opened up the possibility of accumulating big data on plasma phenomena and promoting process development based on plasma science. This will make it possible to initiate a transformation toward the greening of semiconductor processes.