[20p-A309-1~19] 6.1 Ferroelectric thin films

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[20p-A309-13] Lattice parameter control of (Ba,Sr)RuO₃ bottom electrode layer toward enhancement of piezoelectric property of ferroelectric thin films

〇(M1C)Nagi Chujo¹, Kohei Kawade¹, Masahito Yoshino¹, Takanori Nagasaki¹, Tomoaki Yamada^1,2 (1.Nagoya Univ., 2.Tokyo Tech.)

Keywords:

thin films,ferroelectric,electrode