[20p-B101-1~16] 15.4 III-V-group nitride crystals

1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)

[20p-B101-1] Growth of Cu₃N Films by Mist CVD with Ethylenediamine

〇(M2)Shogo Yoshida¹, Kazuyo Omura², Hiroki Nagai¹, Takeyoshi Onuma¹, Tomohiro Yamaguchi¹, Naoya Masahashi², Tohru Honda¹ (1.Kogakuin Univ., 2.IMR, Tohoku Univ.)

Keywords:

Copper nitride,Mist chemical vapor deposition