[20p-B101-1~16] 15.4 III-V-group nitride crystals

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[20p-B101-2] Growth mechanism of c-BN phase in magnetron sputtering growth

〇Kazuyuki Hirama¹, Kazuhide Kumakura¹, Yoshitaka Taniyasu¹ (1.NTT BRL)

Keywords:

cubic boron nitride,magnetron sputtering,diamond