Presentation Information

[20p-B101-3]Effects of AlN template polarity on BN grown by MOVPE.

〇(M2)Yuto Oishi1, Shiyu Xiao1, Kenjiro Uesugi2,3, Toru Akiyama1, Hideto Miyake1 (1.Mie Univ., 2.Sch. of RIS, 3.ORIP)

Keywords:

semiconductor,hexagonal boron nitride,face to face annealing