[20p-B201-1~9] 13.4 Si processing /Si based thin film / MEMS / Equipment technology

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[20p-B201-5] Effects of crystalline quality of 4T poly-Si TFTs on V_th controllability

〇(M1)Yuto Ito¹, Akihisa Nagayoshi¹, Kaisei Nomura¹, Akito Hara¹ (1.Tohoku Gakuin Univ.)

Keywords:

semiconductor,Si,TFT