The 84th JSAP Autumn Meeting 2023
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Session Details

Oral presentation13 Semiconductors : 13.4 Si processing /Si based thin film / MEMS / Equipment technology

[20p-B201-1~9]13.4 Si processing /Si based thin film / MEMS / Equipment technology

Wed. Sep 20, 2023 1:30 PM - 4:00 PM JST
Wed. Sep 20, 2023 4:30 AM - 7:00 AM UTC
B201 (Civic Auditorium)
Tatsuya Okada(Univ. of the Ryukyus), Yan Wu(Tokyo Inst. of Tech.)
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1:30 PM - 1:45 PM JST(4:30 AM - 4:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-B201-1]Supression of process variation of serpentine spring constant for MEMS devices by gold multi-layer metal technology

〇(M1)Kisuke Miyado1, Akira Onishi1, Devi Srujana Tenneti1, Katsuyuki Machida1, Tomoyuki Kurioka1, Pathojit Chakraborty1, Mark Tso-Fu1, Masato Sone1, Yoshihiro Miyake1, Hiroyuki Ito1 (1.Tokyo Tech.)
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1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-B201-2]Vibration measurement of a nanomechanical resonator in liquid using a convolutional neural network

〇(M1)Kazuki Bessho1, Shin'ichi Warisawa1, Reo Kometani1 (1.The Univ. of Tokyo)
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2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-B201-3]TXV Formation Based on FOWLP with Pick-and-Place Cu-Pillar Assembly and Bendability Enhancement

〇(M1C)Atsushi Shinoda1, Akihiro Tominaga2, Hisashi Kino3, Tetsu Tanaka1,3, Takafumi Fukushima1,3 (1.Eng., Tohoku Univ., 2.Tohoku Univ., 3.Bio eng,. Tohoku Univ.)
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2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-B201-4]RDL-first Wafer-to-Wafer Integration Technology for Hydrogel Flexible Hybrid Electronics (FHE) Device

〇Tadaaki Hoshi1, Daichi DaichiNishiguchi2, Hisashi Kino3, Tetsu Tanaka1,3, Takafumi Fukushima1,3 (1.Graduate School of Engineering, Tohoku Univ., 2.School of Engineering, Tohoku Univ., 3.Graduate School of Biomedical Engineering, Tohoku Univ.)
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2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[20p-B201-5]Effects of crystalline quality of 4T poly-Si TFTs on Vth controllability

〇(M1)Yuto Ito1, Akihisa Nagayoshi1, Kaisei Nomura1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)

[20p-B201-6]P-ch Double-Gate Cu-MIC Poly-Ge TFTs Fabricated at 400℃ on Glass Substrates

〇(M2)Sho Suzuki1, Akito Hara1 (1.Tohoku Gakuin Univ.)
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3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[20p-B201-7]Threshold Voltage Control of MONOS-Type LTPS TFTs

〇Tetsuya Goto1,2, Tomoyuki Suwa1,2, Keita Katayama3, Shu Nishida3, Hiroshi Ikenoue4, Shigetoshi Sugawa1 (1.Tohoku Univ., 2.FAIS, 3.Kyushu Univ., 4.Kochi Univ. of Tech.)
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3:30 PM - 3:45 PM JST(6:30 AM - 6:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation AwardEnglish Presentation

[20p-B201-8]Fabrication of Inversion Mode n-channel TFT on Solid-Phase Crystallized Polycrystalline Ge

〇(M2)linyu huang1, Kenta Moto1, Takamitsu Ishiyama2, Kaoru Toko2, Dong Wang1, Keisuke Yamamoto1 (1.Kyushu Univ., 2.Univ. of Tsukuba)
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3:45 PM - 4:00 PM JST(6:45 AM - 7:00 AM UTC)

[20p-B201-9]Sub-6 μm laser microvia on ABF

〇Toshio Otsu1, shuntaro tani1, tomoharu nakazato1, hiroharu tamaru1, kazuyuki sakaue1, yohei kobayashi1 (1.UTokyo)
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