[20p-C402-1~17] 6.2 Carbon-based thin films

4:30 PM - 4:45 PM JST(7:30 AM - 7:45 AM UTC)

[20p-C402-12] Fabrication of layered carbon nitride films under an oxygen-containing gas atmosphere and its effect on electronic property

〇Kota Higuchi¹, Masaki Tachibana¹, Noriyuki Urakami^1,2, Yoshio Hashimoto^1,2 (1.Shinshu Univ., 2.Shinshu Univ. RISM)

Keywords:

semiconductor,Carbon Nitride