[20p-C402-1~17] 6.2 Carbon-based thin films

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)

[20p-C402-14] Chemical Vapor Deposition of Phosphorus-Incorporated Layered Carbon Nitride Film

〇Natsuko Kurimoto¹, Noriyuki Urakami^1,2, Yoshio Hashimoto^1,2 (1.Shinshu Univ., 2.Shinshu Univ. RISM)

Keywords:

layered carbon nitide,phosphorus incorporated,crystal evaluation