[20p-C402-1~17] 6.2 Carbon-based thin films

5:30 PM - 5:45 PM JST(8:30 AM - 8:45 AM UTC)

[20p-C402-16] Electrical insulating properties of amorphous carbon films classified based on optical constants

〇(M1)EITO ICHIJO¹, HIRATSUKA MASANORI², HIRAKURI KENJI¹ (1.Denki Univ., 2.Nanotec)

Keywords:

DLC,electrical insulation,acid resistance