[20p-C402-1~17] 6.2 Carbon-based thin films

5:45 PM - 6:00 PM JST(8:45 AM - 9:00 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-C402-17] High-Speed Deposition of Hydrogen-Free DLC Films by Vacuum Arc Deposition System with a Coiled Anode

〇Seiya Watanabe¹, Kito Jumpei¹, Takahiro Bando¹, Toru Harigai¹, Hirofumi Takikawa¹, Hiroaki Sugita², Takahiro Hattori², Hiroki Gima² (1.Toyohashi Univ. Technol., 2.OSG Co., Ltd.)

Keywords:

DLC,Vacuum arc deposition system,Coiled anode

Experiments were conducted using vacuum arc deposition system with a coiled anode. DLC films were prepared by changing the conditions of the coiled anode magnetic field and the outer coil magnetic field using this equipment. With this setup, DLC films were prepared by varying the conditions of the coiled anode magnetic field and the outer coil magnetic field. Film thickness was determined by calottes, while surface analysis was performed using SEM. The experimental results revealed that the deposition rate was enhanced by using the coiled anode and outer coil. Simultaneously, it was observed that the number of droplets relative to the film thickness decreased.