[20p-C402-1~17] 6.2 Carbon-based thin films

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[20p-C402-3] Evaluation of the chemical bonding states inside the amorphous carbon films by means of X-ray photoemission spectroscopy

〇Yuji Muraoka¹, Sho Enomoto², Yue Qiang³, Hiroyuki Okazaki⁴, Takanori Wakita¹, Takayoshi Yokoya¹ (1.Okayama Univ. RIIS, 2.Okayama Univ., 3.Okayama Univ. Grad. Sch., 4.QST)

Keywords:

Amorphous carbon film,Chemical bonding state,X-ray photoemission spectroscopy

The chemical bonding states inside the armophous carbon films was investigated by means of X-ray photoemission spectroscopy (XPS). The detaied XPS results are preseneted.