[20p-C402-1~17] 6.2 Carbon-based thin films

2:15 PM - 2:30 PM JST(5:15 AM - 5:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-C402-4] Investigation of number of fitting bands in the Raman spectra of DLC films using the HF-HiPIMS method

〇(D)Hiroyuki Fukue¹, Tatsuyuki Nakatani¹, Tadayuki Okano², Masahide Kuroiwa², Shinsuke Kunitsugu³, Susumu Takabayashi⁴, Hiroki Oota⁵, Ken Yonezawa^5,1 (1.Okayama Univ. of Sci., 2.Tokyo Electronics Co., Ltd., 3.Ind. Technol. Cent. Okayama Pref., 4.National Inst. Technol., Ariake College, 5.Kenix Corporation)

Keywords:

diamond-like carbon,Raman spectroscopy,high-power impulse magnetron sputtering

We are developing an HF HiPIMS power supply as a new HiPIMS method for high performance thin films. In this study, we report the investigation of number of fitting bands in the Raman spectra of DLC films using the HF-HiPIMS method. In the Raman spectra of DLC films, the I_D/I_G intensity ratio of the two-peak separation analysis and the N-band area ratio of the five-peak separation analysis were compared with the sp³ ratio. The results showed that the correlation with the sp³ ratio was stronger for the N-band area ratio, confirming the superiority of the five-peak separation analysis.