Presentation Information

[20p-C402-6]Volume changes of DLC films by monochromatized soft X-ray irradiation

〇(M2)Tomohiro Mishima1, Kyoji Morita1, Koji Nakanishi1, Hiroki Akasaka2, Tsuneo Suzuki3, Kazuhiro Kanda1 (1.LASTI, Univ. Hyogo, 2.Tokyo Inst. Tech., 3.Nagaoka Univ. Tech.)

Keywords:

Diamond like carbon