[20p-C402-1~17] 6.2 Carbon-based thin films

3:00 PM - 3:15 PM JST(6:00 AM - 6:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[20p-C402-7] Change in the free volume of highly hydrogenated DLC films with increasing temperature

〇(M1)Daisuke Niwa¹, Tomohiro Mishima¹, Koji Nakanishi¹, Naoki Fukumuro², Atsushi Kinomura³, Kazuhiro Kanda¹ (1.LASTI,Univ.Hyogo, 2.Eng.Univ.Hyogo, 3.KURNS, Kyoto Univ.)

Keywords:

highly-hydrogenated diamond-like carbon films,Thermal decomposition

The H-DLC film has a low friction coefficient in a vacuum and is expected to be used as a solid lubricant in artificial satellites and vacuum chambers. In this study, the H-DLC film was heated to several temperatures, and the thermal decomposition process was discussed from the change in the free volume. As a result, the positron annihilation lifetime and S parameter increased in the sample heated to 200 ℃ compared to the sample not heated, decreased between 360 ℃ and 400 ℃, and increased between 400 ℃ and 450 ℃.