[20p-C402-1~17] 6.2 Carbon-based thin films

3:15 PM - 3:30 PM JST(6:15 AM - 6:30 AM UTC)

[20p-C402-8] Relationship between Young’s modulus and carbon bonding state of EBD carbon tips

〇Subaru Okunishi¹, Keisuke Miyazawa^1,2, Hirotoshi Furusho², Keigo Teramae¹, Takeshi Fukuma^1,2 (1.Kanazawa Univ., 2.WPI-NanoLSI, Kanazawa Univ.)

Keywords:

AFM,amorphous carbon,DLC