[21a-A302-1~12] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

9:00 AM - 9:15 AM JST(12:00 AM - 12:15 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[21a-A302-1] Three-dimensional reconstruction in surface wave plasma and evaluation of its accuracy

〇Miharu Niimoto¹, Akio Sanpei¹, Haruhiko Hmura¹, Yoichi Ito¹, Shinichiro Inagaki¹ (1.KIT Univ.)

Keywords:

plasma process,image reconstruction,surface wave plasma

In this study, we are developing a method for 3D reconstruction of surface wave plasmas and measuring the accuracy of the method. The plasma is photographed through a lens array with multiple lenses of different focal lengths, and the three-dimensional distribution of the plasma is calculated from the images using the Fourier-Bessel method. In this presentation, we will show the results of evaluating the accuracy of the 3D reconstruction based on the type of lens array and the relationship between the 3D distribution, camera position, and field of view, and optimizing the conditions for image reconstruction.