Presentation Information

11:15 AM - 11:30 AM JST(2:15 AM - 2:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[21a-A302-10]Deposition of diamond-like carbon film using rare gas on high power pulsed magnetron sputtering

〇(M2)Keita Takeda¹, Toru Harigai², Akinori Oda³, Hiroyuki Kousaka⁴, Takayuki Ohta¹ (1.Meijo Univ., 2.Toyohashi Univ. Technol., 3.Chiba Inst. Technol., 4.Gifu Univ.)

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Keywords:

Diamond-Like Carbon(DLC),High Power Pulsed Magnetron Sputtering(HPPMS),Energy-resolved mass spectrometry

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