Presentation Information

11:30 AM - 11:45 AM JST(2:30 AM - 2:45 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[21a-A302-11]Deposition of diamond-like carbon using unipolar-double-pulse high-power pulsed magnetron sputtering

〇(M2)Hiro Kunieda¹, Toru Harigai², Akinori Oda³, Hiroyuki Kousaka⁴, Takayuki Ohta¹ (1.Meijo Univ., 2.Toyohashi Univ. Technol., 3.Chiba Inst. Technol., 4.Gifu Univ.)

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Keywords:

High-Power Pulsed Magnetron Sputtering (HPPMS),Diamond-Like Carbon (DLC),Energy-resolved mass spectrometry

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