[21a-A304-1~11] 13.5 Semiconductor devices/ Interconnect/ Integration technologies

9:30 AM - 9:45 AM JST(12:30 AM - 12:45 AM UTC)

[21a-A304-3] Individually Controlled Characteristics of 3D Stacked Silicon Quantum Dots

〇(D)Junoh Kim¹, Tomoko Mizutani¹, Takuya Saraya¹, Hiroshi Oka², Takahiro Mori², Masaharu Kobayashi^1,3, Toshiro Hiramoto¹ (1.IIS, Univ. of Tokyo, 2.AIST, 3.d.lab, Univ. of Tokyo)

Keywords:

quantum dot,single electron transistor