[21a-B101-1~11] 15.4 III-V-group nitride crystals

10:00 AM - 10:15 AM JST(1:00 AM - 1:15 AM UTC)

[21a-B101-5] Multi-channel AlN/AlGaN Schottky barrier diodes

〇Takao Kozaka¹, Ryota Maeda¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS, Tokyo Univ.)

Keywords:

AlN,AlGaN,Sputtering