[21a-P06-1~17] 13.7 Compound and power devices, process technology and characterization

[21a-P06-2] Influence of solution pH on Contactless-Photoelectrochemical (CL-PEC) etching of GaN

〇Yoshito Osawa¹, Masamichi Akazawa¹, Taketomo Sato¹ (1.RCIQE, Hokkaido Univ.)

Keywords:

GaN,Contactless-Photoelectrochemical (CL-PEC) etching