[21p-A201-1~8] Renewed Challenge of Japan to Cutting-Edge Logic Technology

2:05 PM - 2:35 PM JST(5:05 AM - 5:35 AM UTC)

[21p-A201-3] Main-stream Roadmap Technology and Differentiation on Logic Semiconductors:
~Strategical Positioning of Open R&D platform for Semiconductors Technology~

〇Yoshihiro Hayashi¹ (1.AIST)

Keywords:

semiconductor,Si-nanosheet,ASMA

In the logic semiconductor industry, a roadmap for future fundamental technologies is “mostly” shared. Differentiation technology is often built on digital assist technology based on this base technology. This time, under NEDO's research and development project of "Post-5G information communication system infrastructure strengthening"(JPNP20017), process technologies for 3D-structured logic semiconductor devices and its pilot-line start to be developed, and "Consortium for Advanced Semiconductor Manufacturing Technology (ASMA)" is setting for the technology sharing.