Presentation Information
[21p-A302-4]The method of vacuum plasma treatment by solid reductant.
〇Kohshi Taguchi1, Akihiro Yamamura1, Shinya Ueno1, Takayuki Kitagawa1, Motohiro Yamahara1, Kazuyuki Noborio1 (1.Sakigake Semiconductor Co.,Ltd.)
Keywords:
plasma,reduction,ice
We propose a reduction treatment using ice for our proprietary DH-R technology. We observed the reduction of a copper plate treated with oxygen plasma in the power range of 250-1000W, using ice as the reducing agent and a plasma irradiation time of 1 minute.
As a result, the black color of cupric oxide (II) became lighter with increasing treatment power due to the reduction treatment, and the power dependence was also confirmed.
Details of the reduction effect are also reported in terms of the time dependence of the treatment effect and physical properties such as electrical conductivity.
As a result, the black color of cupric oxide (II) became lighter with increasing treatment power due to the reduction treatment, and the power dependence was also confirmed.
Details of the reduction effect are also reported in terms of the time dependence of the treatment effect and physical properties such as electrical conductivity.