[21p-A302-1~9] 8.2 Plasma deposition of thin film, plasma etching and surface treatment

2:00 PM - 2:15 PM JST(5:00 AM - 5:15 AM UTC)

[21p-A302-5] Effect of Atmospheric Pressure Non-equilibrium RF Plasma Jet Irradiation on Direct Bonding of Metal-Organic Dissimilar Materials

〇Kosuke Takenaka¹, Soutaro Nakamoto¹, Ryosuke Koyari¹, Susumu Toko¹, Giichiro Uchida², Yuichi Setsuhara¹ (1.Osaka Univ., 2.Meijo Univ.)

Keywords:

Dissimilar Bonding,Atmospheric Pressure Non-equilibrium RF Plasma Jet