Presentation Information
[21p-B101-10]RF-MBE growth of GaInN with insertion of GaInN buffer layer on GaN using in-situ XRD-RSM
- Growth temperature dependence of GaInN-
〇(M2)Jo Takeuchi1, Takuo Sasaki2, Go Okuma1, Haruka Yokoyama1, Takeyoshi Onuma1, Tohru Honda1, Tomohiro Yamaguchi1, Yasushi Nanishi3 (1.Kogakuin Univ., 2.QST, 3.Ritsumeikan Univ.)
Keywords:
RF-MBE,GaInN,XRD-RSM