[21p-B101-1~16] 15.4 III-V-group nitride crystals

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[21p-B101-2] Growth and characterization of Ge-doped AlGaN grown via sputtering

〇Aiko Naito¹, Kohei Ueno¹, Hiroshi Fujioka¹ (1.IIS)

Keywords:

doping,AlGaN,sputtering