Presentation Information
[21p-B101-4]Comparison of Ohmic Contacts of N-polar GaN HEMT using n+-GaN Regrown by MOCVD and Sputtering
〇Takahide Hirasaki1, Akihiro Hayasaka1, Masaya Okada1, Isao Makabe1, Yukihiro Tsuji1, Kozo Makiyama1, Ken Nakata1 (1.Sumitomo Electric)
Keywords:
Nitride semiconductors,High Electron Mobility Transistors,N-polar