[21p-B203-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

1:45 PM - 2:00 PM JST(4:45 AM - 5:00 AM UTC)

[21p-B203-2] Selective etching of Ge surface assisted by nanocarbon catalysis
- Effect of oxidant added to etchant on etching properties -

〇(M1)Seiya Yamamoto¹, Junhuan Li¹, Kouji Inagaki¹, Kenta Arima¹ (1.Osaka Univ.)

Keywords:

etching,catalyst,nanocarbon

We have discovered non-precious metal type catalyst-assisted etching, in which the Ge surface in contact with nanocarbons is selectively etched in O₂-containing water. We have tried to improve the etching rate by nitrogen doping and so on. In this study, we expected that the addition of an oxidant to the etchant would further improve the etching rate. We added H₂O₂, which is stronger oxidant than O₂ gas in solution, to etchant and investigated its effect on Ge surface structure.