[21p-B203-1~7] 13.1 Fundamental properties, surface and interface, and simulations of Si related materials

2:45 PM - 3:00 PM JST(5:45 AM - 6:00 AM UTC)

[21p-B203-6] Carrier Transport Analyses for Nanosheet MOSFETs

〇Koichi Fukuda¹, Junichi Hattori¹ (1.AIST)

Keywords:

Semiconductor,nanosheet mosfets,cellular automaton method

We investigated the accuracy of the cellular automaton method for mobility modeling of nanosheet transistors.