Presentation Information

4:15 PM - 4:30 PM JST(7:15 AM - 7:30 AM UTC)Presentation by Applicant for JSAP Young Scientists Presentation Award

[21p-C402-10]Stabilization of C-H Diamond Surface Conductivity by Negative Ions Adsorption from Corona Discharge

〇(B)Ryosuke Yamamoto¹, Xuezhen Jia¹, Kento Narita¹, Kosuke Ota^1,2, Atsushi Hiraiwa¹, Tatsuya Fujishima², Hiroshi Kawarada^1,2,3 (1.Waseda Univ., 2.Power Diamond Systems, Inc., 3.Kagami Memorial Inst.)

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Keywords:

Diamond,Hydrogen termination,Corona discharge ionizer

In this study, we improved the conductivity of the C-H surface on the (001) undoped diamond substrate using negative ions generated by a corona discharge ionizer. With corona discharge, the current between Ti/Pt/Au electrodes (spacing: 5μm, width: 70 μm) increased from 0.262 mA to 3.61 mA at V_DS = -10 V. The conductivity of C-H surface was maintained at the same level through photoresist coating and stripping in the channel region. Furthermore, the trench sidewall of the vertical diamond device demonstrated the effectiveness of supplied negative ions to the C-H surface in terms of its conductivity.

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