[21p-C402-1~16] 6.2 Carbon-based thin films

5:00 PM - 5:15 PM JST(8:00 AM - 8:15 AM UTC)English Presentation

[21p-C402-13] Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q

〇(D)Guo Chen^1,2, Zilong Zhang¹, Keyun Gu¹, Satoshi Koizumi¹, Zhaohui Huang², Meiyong Liao¹ (1.NIMS, 2.China University of Geosciences (Beijing))

Keywords:

Single-crystal diamond,MEMS cantilever,Higher-order resonance