講演情報

17:00 〜 17:15英語発表

[21p-C402-13]Effect of Energy Dissipation in Higher-Order Resonance on SCD MEMS Cantilevers Toward High f·Q

〇(D)Guo Chen^1,2, Zilong Zhang¹, Keyun Gu¹, Satoshi Koizumi¹, Zhaohui Huang², Meiyong Liao¹ (1.NIMS, 2.China University of Geosciences (Beijing))

Single-crystal diamond、MEMS cantilever、Higher-order resonance