[21p-P02-1~6] 8.3 Plasma nanotechnology

[21p-P02-1] Deposition of RF sputtered SiGe composite films and their application to high-capacity Li ion battery anodes

〇Tomohisa Nakada¹, Ryo Hanai¹, Kodai Masumoto¹, Masayuki Ishihara¹, Tomoki Omae¹, Reon Yokoi¹, Ryoto Niwa¹, Giichiro Uchida¹ (1.Meijo Univ.)

Keywords:

Li ion battery,sputtering