Presentation Information
[21p-P02-3]Effects of Nanoparticles Deposited in Interface Layer on Delamination and Strength of Sandwich-Structured a-C:H Fims
〇(M2)Shinjiro Ono1, Manato Eri1, Takamasa Okumura1, Kunihiro Kamataki1, Naoto Yamashita1, Haruki Kiyama1, Naho Itagaki1, Kazunori Koga1, Masaharu Shiratani1 (1.Kyushu Univ.)
Keywords:
Carbon nanoparticle,Nanoindentation,Plasma
Amorphous carbon (a-C(:H)) thin films have been extensively studied in various fields, such as protective coatings for automotive components, hard masks in semiconductor device fabrication, and biocompatible films for medical devices. The mechanical properties related to film delamination, such as film stress and fracture toughness, are crucial for the durability of the films. Recent our research has revealed that the introduction of carbon nanparticles (CNP) into a-C(:H) thin films can reduce film stress. In this study, we evaluated other characteristics of the samples with CNP insertion and investigated the influence of CNPs on the mechanical properties of the films, aiming for practical applications.