The 84th JSAP Autumn Meeting 2023
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Tue. Sep 19, 2023
Wed. Sep 20, 2023
Thu. Sep 21, 2023
Fri. Sep 22, 2023
Sat. Sep 23, 2023
JSAP EXPO (Exhibition) 1
Vacuum
Materials
Photonics
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Analytical
Thin-Film
Electrical
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M＆BE
JSAP EXPO (Exhibition) 2
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Presentation Information
[21p-P05-9]
Investigation of growth conditions of InSb
1-
x
N
x
thin films by DC sputtering method
〇Sachie Fujikawa
1
, Hiroyuki Yaguchi
1
(1.Saitama Univ.)
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Keywords:
sputtering,XRD,InSbN
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