[21p-P06-1~14] 15.4 III-V-group nitride crystals

[21p-P06-2] Post-annealing of hexagonal boron nitride thin films prepared by low-pressure CVD

〇Taiki Oishi¹, Ruki Aoike¹, Soma Ota¹, Yuma Takahashi¹, Akira Takemura¹, Hiroko Kominami¹, Kazuhiko Hara^1,2,3 (1.Shizuoka Univ., 2.Medical Photonics, 3.Elec. research Inst.)

Keywords:

hexagonal boron nitride,CVD,thin film