Presentation Information
[21p-P06-3]Low-pressure CVD of hexagonal boron nitride on a-plane sapphire
〇Soma Ota1, Taiki Oishi1, Ruki Aoike1, Yuma Takahashi1, Akira Takemura1, Hiroko Kominami1, Kazuhiko Hara1,2,3 (1.Shizuoka Univ., 2.Hikariikogaku Inst., 3.Densikogaku Inst.)
Keywords:
hexagonal boron nitride,CVD,a-plane sapphire