[21p-P06-1~14] 15.4 III-V-group nitride crystals

[21p-P06-4] Low-pressure CVD of hexagonal boron nitride on an AlN epitaxial layer

〇Ruki Aoike¹, Taiki Oishi¹, Soma Ota¹, Yuma Takahashi¹, Akira Takemura¹, Hiroko Kominami¹, Kazuhiko Hara^1,2,3 (1.Shizuoka Univ., 2.Medical photonics, 3.Elec. Res. Inst.)

Keywords:

BN,AlN,CVD